SUSS MicroTec Introduces Dedicated Lithography System for the LED Market

Fully automatic lithography machine MA100e Gen 2 for the production of high-brightness LEDs June 8, 2010 Munich Electric, SUSS MicroTec, the world's leading supplier of semiconductor industry and related equipment and process solutions, launched a new generation MA100e lithography machine Designed for the production of high brightness light emitting diodes (HB-LEDs). Based on the classic design of the SUSS MicroTec lithography machine, the MA100e has a carrier capacity of up to 4 inches and an output of 145 pieces per hour, leading the industry. Demand for LED backlights, such as televisions and displays, has grown dramatically, and LED device manufacturers must do their best to meet this market growth need. The LED industry is very cost sensitive, so the MA100e Gen2 automatic lithography machine designed by SUSS MicroTec is very competitive in terms of cost control. The high-illuminance optical path and pre-alignment system of the device configuration greatly shortens the working time, and the functional close-up lithography resolution can reach 2.5um, which greatly improves the productivity and cost efficiency. The MA100e Gen2 offers superior process scalability, enabling users to bring new chip designs to market quickly. Mr. Frank Averdung, President and CEO of SUSS MicroTec, said: "We are clearly aware of the growing demand for cutting-edge high-brightness LED technology and see the LED industry begin to move toward high automation in order to reduce costs. New development by SUSS MicroTec The first generation of the MA100e is a high-efficiency fully automated lithography machine designed for LED production, helping our customers reduce the cost per lumen and increase productivity."

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